Micro and semiconductor technology

Offerings in the field of micro and semiconductor technology

Structuring

  • Optical mask-based lithography (contact and spacer lithography)
  • Image Reversal Resist
  • KOH silicon etching

Simulation

  • Ion implantation simulation
  • One-dimensional silicon technology simulation

Layer deposition

  • Magnetron-DC-RF sputtering
  • Thermal vapour deposition, also e-beam

Wire bonding

  • Wedge-Wedge
  • Ball-Wedge

Laboratory areas